LEADER 00000nam 2200000uu 4500 |
001 13399111837 |
003 ULIBM |
008 120712s||||||||th 000 0 tha d |
020 0071139133 |
040 DLC^cDLC^dCUY^dUKM^dGZM^dWSU |
050 00 TA418.9.T45^bS65 1995 |
082 00 ^a621.3815^bST |
100 1 Smith, Donald L.^q(Donald Leonard),^d1944- |
245 10 Thin-film deposition :^bprinciples and practice /^cDonaldL. Smith |
260 New York :^bMcGraw-Hill,^cc1995 |
300 xxiii, 616 p. :^bill. ;^c24 cm^d965 |
504 Includes bibliographical references and index |
650 0 Thin films |
650 0 Vapor-plating |
650 0 Thin film devices |
653 0 Thin films |
945 ^p965^l0^i008445 |
999 ^aคณะวิศวะ (มมส) |