| LEADER 00000nam  2200000uu 4500 | 
	
							| 001    13399113604 | 
							| 003      ULIBM | 
							| 005      20110118125753.0 | 
							| 008    120815s||||||||th            000 0 tha d | 
							| 020    9780470749838 (cloth) | 
							| 035    (OCoLC)560554895 | 
							| 040    DLC^cDLC^dYDXCP^dCDX^dBGU | 
							| 040    DLC^cDLC^dYDXCP^dCDX^dBGU | 
							| 050 00 TK7875^b.F73 2010 | 
							| 050 00 TK7875^b.F73 2010 | 
							| 082 00 ^a621.381^bSI | 
							| 100 1  Franssila, Sami | 
							| 245 10 Introduction to microfabrication /^cSami Franssila | 
							| 250    ^a2nd ed | 
							| 260    Chichester, West Sussex, England ;^aHoboken, NJ :^bJohnWiley & Sons,^c2010  | 
							| 263    1012 | 
							| 300    518 p. :^bill. ;^c25 cm^d2,400B | 
							| 500    Includes index | 
							| 650  0 Microelectromechanical systems | 
							| 650  0 Electronic apparatus and appliances | 
							| 650  0 Microfabrication | 
							| 650  0 Microelectromechanical systems | 
							| 650  0 Electronic apparatus and appliances | 
							| 650  0 Microfabrication | 
							| 945    ^p2^l0^i009960 | 
							| 999    ^aคณะวิศวะ (มมส) |