| LEADER 00000nam 2200000uu 4500 |
| 001 13399113604 |
| 003 ULIBM |
| 005 20110118125753.0 |
| 008 120815s||||||||th 000 0 tha d |
| 020 9780470749838 (cloth) |
| 035 (OCoLC)560554895 |
| 040 DLC^cDLC^dYDXCP^dCDX^dBGU |
| 040 DLC^cDLC^dYDXCP^dCDX^dBGU |
| 050 00 TK7875^b.F73 2010 |
| 050 00 TK7875^b.F73 2010 |
| 082 00 ^a621.381^bSI |
| 100 1 Franssila, Sami |
| 245 10 Introduction to microfabrication /^cSami Franssila |
| 250 ^a2nd ed |
| 260 Chichester, West Sussex, England ;^aHoboken, NJ :^bJohnWiley & Sons,^c2010 |
| 263 1012 |
| 300 518 p. :^bill. ;^c25 cm^d2,400B |
| 500 Includes index |
| 650 0 Microelectromechanical systems |
| 650 0 Electronic apparatus and appliances |
| 650 0 Microfabrication |
| 650 0 Microelectromechanical systems |
| 650 0 Electronic apparatus and appliances |
| 650 0 Microfabrication |
| 945 ^p2^l0^i009960 |
| 999 ^aคณะวิศวะ (มมส) |