LEADER 00000nam 2200000uu 4500 |
001 13399113604 |
003 ULIBM |
005 20110118125753.0 |
008 120815s||||||||th 000 0 tha d |
020 9780470749838 (cloth) |
035 (OCoLC)560554895 |
040 DLC^cDLC^dYDXCP^dCDX^dBGU |
040 DLC^cDLC^dYDXCP^dCDX^dBGU |
050 00 TK7875^b.F73 2010 |
050 00 TK7875^b.F73 2010 |
082 00 ^a621.381^bSI |
100 1 Franssila, Sami |
245 10 Introduction to microfabrication /^cSami Franssila |
250 ^a2nd ed |
260 Chichester, West Sussex, England ;^aHoboken, NJ :^bJohnWiley & Sons,^c2010 |
263 1012 |
300 518 p. :^bill. ;^c25 cm^d2,400B |
500 Includes index |
650 0 Microelectromechanical systems |
650 0 Electronic apparatus and appliances |
650 0 Microfabrication |
650 0 Microelectromechanical systems |
650 0 Electronic apparatus and appliances |
650 0 Microfabrication |
945 ^p2^l0^i009960 |
999 ^aคณะวิศวะ (มมส) |