LEADER 00000nam 2200000uu 4500 |
001 13399113608 |
003 ULIBM |
008 120815s||||||||th 000 0 tha d |
020 9789812705426 (pbk.) |
035 (OCoLC)173721197^z(OCoLC)148984970^z(OCoLC)148984980 |
040 UKM^cUKM^dBTCTA^dYDXCP^dBAKER^dOCLCG^dTXA^dCUS^dBWX^dDLC |
050 00 TA418.9.N35^bN252 2008 |
082 04 ^a620.5 ^bTN |
100 0 Ampere A. Tseng |
245 00 Nanofabrication :^bfundamentals and applications /^ceditor,Ampere A. Tseng |
260 Singapore ;^aHackensack, NJ :^bWorld Scientific,^cc2008 |
300 viii, 574 p. :^bill. (some col.) ;^c26 cm^d3,294B |
504 Includes bibliographical references and index |
650 0 Nanostructured materials |
650 0 Nanostructures |
650 0 Scanning probe microscopy |
650 0 Lithography, Electron beam |
700 1 Tseng, A. A.^q(Ampere A.) |
945 ^p3^l0^i010118 |
999 ^aคณะวิศวะ (มมส) |