| LEADER 00000nam 2200000uu 4500 |
| 001 13399113608 |
| 003 ULIBM |
| 008 120815s||||||||th 000 0 tha d |
| 020 9789812705426 (pbk.) |
| 035 (OCoLC)173721197^z(OCoLC)148984970^z(OCoLC)148984980 |
| 040 UKM^cUKM^dBTCTA^dYDXCP^dBAKER^dOCLCG^dTXA^dCUS^dBWX^dDLC |
| 050 00 TA418.9.N35^bN252 2008 |
| 082 04 ^a620.5 ^bTN |
| 100 0 Ampere A. Tseng |
| 245 00 Nanofabrication :^bfundamentals and applications /^ceditor,Ampere A. Tseng |
| 260 Singapore ;^aHackensack, NJ :^bWorld Scientific,^cc2008 |
| 300 viii, 574 p. :^bill. (some col.) ;^c26 cm^d3,294B |
| 504 Includes bibliographical references and index |
| 650 0 Nanostructured materials |
| 650 0 Nanostructures |
| 650 0 Scanning probe microscopy |
| 650 0 Lithography, Electron beam |
| 700 1 Tseng, A. A.^q(Ampere A.) |
| 945 ^p3^l0^i010118 |
| 999 ^aคณะวิศวะ (มมส) |