| LEADER 00000nam  2200000uu 4500 | 
	
							| 001    13399113608 | 
							| 003      ULIBM | 
							| 008    120815s||||||||th            000 0 tha d | 
							| 020    9789812705426 (pbk.) | 
							| 035    (OCoLC)173721197^z(OCoLC)148984970^z(OCoLC)148984980 | 
							| 040    UKM^cUKM^dBTCTA^dYDXCP^dBAKER^dOCLCG^dTXA^dCUS^dBWX^dDLC | 
							| 050 00 TA418.9.N35^bN252 2008 | 
							| 082 04 ^a620.5     ^bTN | 
							| 100 0  Ampere A. Tseng  | 
							| 245 00 Nanofabrication :^bfundamentals and applications /^ceditor,Ampere A. Tseng  | 
							| 260    Singapore ;^aHackensack, NJ :^bWorld Scientific,^cc2008 | 
							| 300    viii, 574 p. :^bill. (some col.) ;^c26 cm^d3,294B | 
							| 504    Includes bibliographical references and index | 
							| 650  0 Nanostructured materials | 
							| 650  0 Nanostructures | 
							| 650  0 Scanning probe microscopy | 
							| 650  0 Lithography, Electron beam | 
							| 700 1  Tseng, A. A.^q(Ampere A.) | 
							| 945    ^p3^l0^i010118 | 
							| 999    ^aคณะวิศวะ (มมส) |