| LEADER 00000nam 2200000uu 4500 |
| 001 13399113791 |
| 003 ULIBM |
| 005 20040707130203.0 |
| 008 121122s||||||||th 000 0 tha d |
| 010 2004046158 |
| 020 1580535364 |
| 024 9781580535366 |
| 040 DLC^cDLC^dC#P^dCIN |
| 042 pcc |
| 082 00 ^a681.3 ^bBM |
| 100 0 Stephen Beeby |
| 245 00 MEMS mechanical sensors /^cStephen Beeby ... [et al.] |
| 260 Boston :^bArtech House,^cc2004 |
| 300 x, 269 p. :^bill. ;^c26 cm |
| 490 1 Artech House microelectromechanical systems (MEMS) series |
| 504 Includes bibliographical references and index |
| 650 0 Microelectromechanical systems |
| 650 0 Detectors |
| 700 1 Graham Ensell |
| 700 0 Michael Kraft |
| 700 0 Neil White |
| 830 0 Microelectromechanical systems series |
| 945 ^p0^l0^i14010456 |
| 999 ^aคณะวิศวะ (มมส) |