LEADER 00000nam 2200000uu 4500 |
001 13399113791 |
003 ULIBM |
005 20040707130203.0 |
008 121122s||||||||th 000 0 tha d |
010 2004046158 |
020 1580535364 |
024 9781580535366 |
040 DLC^cDLC^dC#P^dCIN |
042 pcc |
082 00 ^a681.3 ^bBM |
100 0 Stephen Beeby |
245 00 MEMS mechanical sensors /^cStephen Beeby ... [et al.] |
260 Boston :^bArtech House,^cc2004 |
300 x, 269 p. :^bill. ;^c26 cm |
490 1 Artech House microelectromechanical systems (MEMS) series |
504 Includes bibliographical references and index |
650 0 Microelectromechanical systems |
650 0 Detectors |
700 1 Graham Ensell |
700 0 Michael Kraft |
700 0 Neil White |
830 0 Microelectromechanical systems series |
945 ^p0^l0^i14010456 |
999 ^aคณะวิศวะ (มมส) |