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| 001 13399113791 |
| 003 ULIBM |
| 005 20040707130203.0 |
| 008 121122s||||||||th 000 0 tha d |
| 010 2004046158 |
| 020 1580535364 |
| 024 9781580535366 |
| 040 DLC^cDLC^dC#P^dCIN |
| 042 pcc |
| 082 00 ^a681.3 ^bBM |
| 100 0 Stephen Beeby |
| 245 00 MEMS mechanical sensors /^cStephen Beeby ... [et al.] |
| 260 Boston :^bArtech House,^cc2004 |
| 300 x, 269 p. :^bill. ;^c26 cm |
| 490 1 Artech House microelectromechanical systems (MEMS) series |
| 504 Includes bibliographical references and index |
| 650 0 Microelectromechanical systems |
| 650 0 Detectors |
| 700 1 Graham Ensell |
| 700 0 Michael Kraft |
| 700 0 Neil White |
| 830 0 Microelectromechanical systems series |
| 945 ci3ug^bb3644281^ci41454280^o1^sN |
| 945 mu3ug^bb3114576^ci41474744^sN |
| 945 bg1ug^bb2679646^ci41556908^sN |
| 945 os4ug^bb5816085^ci41836845^sN |
| 945 ws3ug^bb2326971^ci42077662^sN |
| 999 ^aคณะวิศวะ (มมส) |
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